精品三轴电容式加速度计830系列MEMS加速度传感器：

特点： –55 to 125低温加速度计，电容式原理，DC响应，三轴加速度测量

信号输出, ±10%, 25°C............................................................ ±2000 mV
加速度量程Acceleration range(g) ..................................................... 2/5/10/30/50/100/200
非线性Amplitude nonlinearity..................................................... 1%
频响Frequency response(+/-3dB):
2g.................................................................................... 0 - 800 Hz
5g.................................................................................... 0 - 1700 Hz
10g.................................................................................. 0 - 2400 Hz
30g.................................................................................. 0 - 3000 Hz
50g.................................................................................. 0 - 3000 Hz
100g................................................................................ 0 - 3000 Hz
200g................................................................................ 0 - 3000 Hz
Zero................................................................................. ±20mV
Transverse sensitivity, max............................................. 3% of axial
Temperature response, max:
Zero shift ......................................................................... ±0.02%SFO/°C
Scale shift........................................................................ ±0.025%/°C
Electrical
供电电压Power requirement: 888888................................... 5 - 30 VDC
Current consumption ....................................................... <10 mA
Electrical noise, Broadband Spectral:
0 Hz to 4 kHz.................................................................... 27µV/√Hz
Output load....................................................................... Min. 50 Kohm
Bias output voltage........................................................... 2.5 VDC
Grounding......................................................................... Case isolated
Environmental
加速度计工作温度Temperature range........................................................... –55 to 125°C